Browsing by author "Brasseur, Guy"

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Analysis of the etch rate limiting steps in dry etching of tungsten in fluorine containing plasmas

Verdonck, Patrick; Swart, J.; Brasseur, Guy; De Geyter, Pascal (1994)
Analysis of the etching mechanisms of tungsten in fluorine containing plasmas

Verdonck, Patrick; Swart, J.; Brasseur, Guy; De Geyter, Pascal (1995)