Browsing by author "D'Urzo, Lucia"
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High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography
D'Urzo, Lucia; Umeda, Toru; Mizuno, Takehito; Hattori, Atsushi; Singh, Amarnauth; Beera, Rajan; Foubert, Philippe; Drent, Waut (2021)