Authors

D'Urzo, Lucia; Umeda, Toru; Mizuno, Takehito; Hattori, Atsushi; Singh, Amarnauth; Beera, Rajan; Foubert, Philippe; Drent, Waut

DOI

10.1117/12.2584064

EISBN

978-1-5106-4058-0

ISBN

978-1-5106-4057-3

ISSN

0277-786X

Conference

Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference

Journal

Proceedings of SPIE

Volume

11612

Title

High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography

Publication type

Proceedings paper