Publication:

High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2584064
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Author(s)

D'Urzo, Lucia
;
Umeda, Toru
;
Mizuno, Takehito
;
Hattori, Atsushi
;
Singh, Amarnauth
;
Beera, Rajan
;
Foubert, Philippe  
;
Drent, Waut  

Journal

Proceedings of SPIE

Abstract

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1343 since deposited on 2022-09-08
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Acq. date: 2026-09-20

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