High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography

dc.contributor.author	D'Urzo, Lucia
dc.contributor.author	Umeda, Toru
dc.contributor.author	Mizuno, Takehito
dc.contributor.author	Hattori, Atsushi
dc.contributor.author	Singh, Amarnauth
dc.contributor.author	Beera, Rajan
dc.contributor.author	Foubert, Philippe
dc.contributor.author	Drent, Waut
dc.contributor.imecauthor	Foubert, Philippe
dc.contributor.imecauthor	Drent, Waut
dc.date.accessioned	2023-01-19T14:10:11Z
dc.date.available	2022-09-08T02:39:18Z
dc.date.available	2023-01-19T14:10:11Z
dc.date.issued	2021
dc.identifier.doi	10.1117/12.2584064
dc.identifier.eisbn	978-1-5106-4058-0
dc.identifier.isbn	978-1-5106-4057-3
dc.identifier.issn	0277-786X
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40391
dc.publisher	SPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage	116120H
dc.source.conference	Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference
dc.source.conferencedate	FEB 22-26, 2021
dc.source.conferencelocation	Virtual
dc.source.journal	Proceedings of SPIE
dc.source.numberofpages	5
dc.source.volume	11612
dc.title	High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography
dc.type	Proceedings paper
dspace.entity.type	Publication
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