Browsing by author "Drent, Waut"
Now showing items 1-3 of 3
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Defectivity modulation in EUV resists through advanced filtration technologies
D'Urzo, Lucia; Umeda, T.; Mizuno, T.; Hattori, A.; Varanasi, R.; Singh, A.; Beera, R.; Foubert, Philippe; Vandereyken, Jelle; Drent, Waut (2020) -
Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters
Zhang, Yiren; Umeda, Toru; Sakakibara, Hirokazu; Ibrahim, Sheik Ansar Usman; Sakamoto, Atsushi; Singh, Amarnauth; Shick, Robert; Skjonnemand, Karl; Foubert, Philippe; Drent, Waut (2023) -
High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography
D'Urzo, Lucia; Umeda, Toru; Mizuno, Takehito; Hattori, Atsushi; Singh, Amarnauth; Beera, Rajan; Foubert, Philippe; Drent, Waut (2021)