Publication:

Defectivity modulation in EUV resists through advanced filtration technologies

Date

2020
Proceedings Paper
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Author(s)

D'Urzo, Lucia  
;
Umeda, T.
;
Mizuno, T.
;
Hattori, A.
;
Varanasi, R.
;
Singh, A.
;
Beera, R.
;
Foubert, Philippe  
;
Vandereyken, Jelle  
;
Drent, Waut  

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1995 since deposited on 2021-10-28
Acq. date: 2025-10-28

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1995 since deposited on 2021-10-28
Acq. date: 2025-10-28

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