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Defectivity modulation in EUV resists through advanced filtration technologies
Publication:
Defectivity modulation in EUV resists through advanced filtration technologies
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Date
2020
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
D'Urzo, Lucia
;
Umeda, T.
;
Mizuno, T.
;
Hattori, A.
;
Varanasi, R.
;
Singh, A.
;
Beera, R.
;
Foubert, Philippe
;
Vandereyken, Jelle
;
Drent, Waut
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1997
since deposited on 2021-10-28
1
last month
Acq. date: 2025-12-12
Citations
Metrics
Views
1997
since deposited on 2021-10-28
1
last month
Acq. date: 2025-12-12
Citations