Browsing by author "Singh, Amarnauth"

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Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters

Zhang, Yiren; Umeda, Toru; Sakakibara, Hirokazu; Ibrahim, Sheik Ansar Usman; Sakamoto, Atsushi; Singh, Amarnauth; Shick, Robert; Skjonnemand, Karl; Foubert, Philippe; Drent, Waut (2023)
High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography

D'Urzo, Lucia; Umeda, Toru; Mizuno, Takehito; Hattori, Atsushi; Singh, Amarnauth; Beera, Rajan; Foubert, Philippe; Drent, Waut (2021)