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High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography

dc.contributor.authorD'Urzo, Lucia
dc.contributor.authorUmeda, Toru
dc.contributor.authorMizuno, Takehito
dc.contributor.authorHattori, Atsushi
dc.contributor.authorSingh, Amarnauth
dc.contributor.authorBeera, Rajan
dc.contributor.authorFoubert, Philippe
dc.contributor.authorDrent, Waut
dc.date.accessioned2023-01-19T14:10:11Z
dc.date.available2022-09-08T02:39:18Z
dc.date.available2023-01-19T14:10:11Z
dc.date.issued2021
dc.identifier.isbn978-1-5106-4057-3
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000844537900010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40391.3
dc.sourceWOS
dc.titleHigh performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography
dc.typeProceedings paper
dc.contributor.imecauthorFoubert, Philippe
dc.contributor.imecauthorDrent, Waut
dc.identifier.doi10.1117/12.2584064
dc.identifier.eisbn978-1-5106-4058-0
dc.source.numberofpages5
dc.source.peerreviewyes
dc.source.beginpage116120H
dc.source.conferenceConference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference
dc.source.conferencedateFEB 22-26, 2021
dc.source.conferencelocationVirtual
dc.source.journalProceedings of SPIE
dc.source.volume11612
imec.availabilityPublished - imec


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320.500.12860/40391.3*2023-01-19T14:07:45Zvalidation by library/open access desk
120.500.12860/403912022-09-08T02:39:18Z

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