Browsing by author "Peeters, Jozef"
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Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species
Delabie, Annelies; Swerts, Johan; Van Elshocht, Sven; Jung, Sung-Hoon; Raisanen, Petri; Givens, Michael; Shero, Eric; Peeters, Jozef; Machkaoutsan, Vladimir; Maes, Jan (2011-03) -
Stochastic simulation of chemically activated unimolecular reactions
Vereecken, Luc; Huyberechts, Guido; Peeters, Jozef (1997)