Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species

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Author(s)

Delabie, Annelies

;

;

Van Elshocht, Sven

;

Jung, Sung-Hoon

;

Raisanen, Petri

;

Givens, Michael

;

;

;

Machkaoutsan, Vladimir

;

Journal

Journal of the Electrochemical Society

Metrics

1979 since deposited on 2021-10-19

Acq. date: 2025-10-24