Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species

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Authors

Delabie, Annelies; Swerts, Johan; Van Elshocht, Sven; Jung, Sung-Hoon; Raisanen, Petri; Givens, Michael; Shero, Eric; Peeters, Jozef; Machkaoutsan, Vladimir; Maes, Jan

ISSN

0013-4651

Issue

5

Journal

Journal of the Electrochemical Society

Volume

158

Title

Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species

Publication type

Journal article

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