Publication:

Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species

Date

2011-03
Journal article
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dc.contributor.authorDelabie, Annelies
dc.contributor.authorSwerts, Johan
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorJung, Sung-Hoon
dc.contributor.authorRaisanen, Petri
dc.contributor.authorGivens, Michael
dc.contributor.authorShero, Eric
dc.contributor.authorPeeters, Jozef
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorMaes, Jan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorGivens, Michael
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorMaes, Jan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-19T13:12:45Z
dc.date.available2021-10-19T13:12:45Z
dc.date.issued2011-03
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18825
dc.source.beginpageD259
dc.source.endpageD263
dc.source.issue5
dc.source.journalJournal of the Electrochemical Society
dc.source.volume158
dc.title

Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species

dc.typeJournal article
dspace.entity.typePublication
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