Browsing by author "den Toonder, J.M.J."
Now showing items 1-3 of 3
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Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients
De Coster, J.; Tilmans, Harrie; den Toonder, J.M.J.; van Beek, J.T.M.; Rijks, T.G.S.M.; Steeneken, P.G.; Puers, Bob (2005) -
MEMS tunable capacitors and switches for RF applications
Rijks, T.G.S.M.; van Beek, J.T.M.; Steeneken, P.G.; Ulenaers, M.J.E.; van Eerd, P.; den Toonder, J.M.J.; van Dijken, Q.R.; De Coster, Jeroen; Puers, Bob; Weekamp, J.W.; Scheer, J.M.; Jourdain, Anne; Tilmans, Harrie (2004) -
Reliability of RF-MEMS: stress relaxation in Al-alloy films
Modlinski, Robert; Chen, Q.; Witvrouw, Ann; Ratchev, Petar; Puers, Bob; den Toonder, J.M.J.; De Wolf, Ingrid (2003)