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Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients
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Authors
De Coster, J.
;
Tilmans, Harrie
;
den Toonder, J.M.J.
;
van Beek, J.T.M.
;
Rijks, T.G.S.M.
;
Steeneken, P.G.
;
Puers, Bob
Journal
Sensors & Actuators A
Volume
123-124
Title
Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients
Publication type
Journal article
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