Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients

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Author(s)

;

Tilmans, Harrie

;

den Toonder, J.M.J.

;

van Beek, J.T.M.

;

Rijks, T.G.S.M.

;

Steeneken, P.G.

;

Journal

Sensors & Actuators A

Metrics

1903 since deposited on 2021-10-16

Acq. date: 2025-10-23