Publication:

Reliability of RF-MEMS: stress relaxation in Al-alloy films

Date

2003

Meeting abstract

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Author(s)

Modlinski, Robert

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;

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;

den Toonder, J.M.J.

;

De Wolf, Ingrid

Statistics

1947 since deposited on 2021-10-15

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Acq. date: 2026-05-18