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Conference contributions
Reliability of RF-MEMS: stress relaxation in Al-alloy films
Publication:
Reliability of RF-MEMS: stress relaxation in Al-alloy films
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Date
2003
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Modlinski, Robert
;
Chen, Q.
;
Witvrouw, Ann
;
Ratchev, Petar
;
Puers, Bob
;
den Toonder, J.M.J.
;
De Wolf, Ingrid
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Abstract
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1940
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Acq. date: 2025-12-14
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Metrics
Views
1940
since deposited on 2021-10-15
3
last month
2
last week
Acq. date: 2025-12-14
Citations