Publication:

Reliability of RF-MEMS: stress relaxation in Al-alloy films

Date

2003

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

Modlinski, Robert

;

;

;

;

;

den Toonder, J.M.J.

;

De Wolf, Ingrid

Statistics

1952 since deposited on 2021-10-15

Acq. date: 2026-09-14