Browsing by author "Kearney, Pat"

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Characterization of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images

Raghunathan, Sudhar; Wood, Obert; Mangat, Pawitter; Verduijn, Erik; Philipsen, Vicky; Hendrickx, Eric; Jonckheere, Rik; Goldberg, Ken; Benk, Marcus; Kearney, Pat; Levinson, Zachary; Smith, Bruce (2014)