Authors

Raghunathan, Sudhar; Wood, Obert; Mangat, Pawitter; Verduijn, Erik; Philipsen, Vicky; Hendrickx, Eric; Jonckheere, Rik; Goldberg, Ken; Benk, Marcus; Kearney, Pat; Levinson, Zachary; Smith, Bruce

ISSN

1071-1023

Issue

6

Journal

Journal of Vacuum Science and Technology B

Volume

32

Title

Characterization of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images

Publication type

Journal article