Publication:

Characterization of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images

Date

2014
Journal article
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dc.contributor.authorRaghunathan, Sudhar
dc.contributor.authorWood, Obert
dc.contributor.authorMangat, Pawitter
dc.contributor.authorVerduijn, Erik
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorHendrickx, Eric
dc.contributor.authorJonckheere, Rik
dc.contributor.authorGoldberg, Ken
dc.contributor.authorBenk, Marcus
dc.contributor.authorKearney, Pat
dc.contributor.authorLevinson, Zachary
dc.contributor.authorSmith, Bruce
dc.contributor.imecauthorVerduijn, Erik
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.accessioned2021-10-22T04:57:16Z
dc.date.available2021-10-22T04:57:16Z
dc.date.issued2014
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24413
dc.identifier.urlhttp://scitation.aip.org/content/avs/journal/jvstb/32/6/10.1116/1.4901876
dc.source.beginpage06F801
dc.source.issue6
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume32
dc.title

Characterization of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images

dc.typeJournal article
dspace.entity.typePublication
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