Browsing by author "O'Brien, Kevin"

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    • Advanced EUV patterning of 2D TMDs for CMOS integration 

      Faramarzi, Vina; de Poortere, Etienne; Venugopalan, Syam Parayil; Woltgens, Pieter; Woo, Youngtag; van de Kerkhof, Mark; Kumar, Pawan; Medina Silva, Henry; Morin, Pierre; Asselberghs, Inge; Dorow, Chelsey; O'Brien, Kevin; Maxey, Kirby; Avci, Uygar (2024)