Browsing by author "White, Daniela"
Now showing items 1-3 of 3
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Mechanistic and electrochemical aspects of copper and cobalt post CMP cleaners for 5-7 nm nodes
White, Mike; White, Daniela; Wang, Volley; Liu, Jun; Thomas, Elisabeth; Frye, Don; Lieten, Ruben; Parson, Thomas (2017) -
Post-CMP cleaners for tungsten advanced nodes: 10 nm and 7 nm
Lieten, Ruben; White, Daniela; Parson, Thomas; Jenq, Shining; Frye, Don; White, Michael; Teugels, Lieve; Struyf, Herbert (2017-10) -
Post-CMP cleaners for tungsten at advanced nodes
Lieten, Ruben; White, Daniela; Parson, Thomas; Jenq, Shining; Frye, Don; White, Michael; Teugels, Lieve; Struyf, Herbert (2016)