Publication:

Mechanistic and electrochemical aspects of copper and cobalt post CMP cleaners for 5-7 nm nodes

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

Thomas, Elisabeth

;

;

;

Statistics

1839 since deposited on 2021-10-24

4last month

Acq. date: 2026-05-19