Browsing by author "Dervillé, A."

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Next generation of decision making software for nanopatterns metrology: application to semiconductor industry

Dervillé, A.; Labrosse, A.; Zimmermann, Y.; Foucher, Johann; Gronheid, Roel; Boeckx, Carolien; Singh, Arjun; Leray, Philippe; Halder, Sandip (2016)