Authors

Dervillé, A.; Labrosse, A.; Zimmermann, Y.; Foucher, Johann; Gronheid, Roel; Boeckx, Carolien; Singh, Arjun; Leray, Philippe; Halder, Sandip

Conference

Metrology, Inspection, and Process Control for Microlithography XXX

Title

Next generation of decision making software for nanopatterns metrology: application to semiconductor industry

Publication type

Proceedings paper