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Next generation of decision making software for nanopatterns metrology: application to semiconductor industry
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Next generation of decision making software for nanopatterns metrology: application to semiconductor industry
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dervillé, A.
;
Labrosse, A.
;
Zimmermann, Y.
;
Foucher, Johann
;
Gronheid, Roel
;
Boeckx, Carolien
;
Singh, Arjun
;
Leray, Philippe
;
Halder, Sandip
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1917
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Acq. date: 2025-12-10
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1917
since deposited on 2021-10-23
1
last month
Acq. date: 2025-12-10
Citations