Browsing by author "Mogilnikov, K."

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Adsorption isobars of fluorocarbon compounds selected for cryogenic etching of low-k materials

Rezvanov, A.; Mogilnikov, K.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Zhang, Liping; Dussarrat, C.; de Marneffe, Jean-Francois; Baklanov, Mikhaïl (2015)
Investigation of plasma damage of low-k dielectrics during cryogenic etching

Rezvanov, A.; Miakonkikh, A.; Vishnevsky, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogilnikov, K.; Rudenko, K.; Baklanov, Mikhaïl (2015)