Publication:
Adsorption isobars of fluorocarbon compounds selected for cryogenic etching of low-k materials
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1990 since deposited on 2021-10-22
3last month
Acq. date: 2026-08-11
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Statistics
Views
1990 since deposited on 2021-10-22
3last month
Acq. date: 2026-08-11
Citations