Investigation of plasma damage of low-k dielectrics during cryogenic etching

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Authors
Rezvanov, A.; Miakonkikh, A.; Vishnevsky, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogilnikov, K.; Rudenko, K.; Baklanov, Mikhaïl
Conference
Microelectronics - 2015
Title
Investigation of plasma damage of low-k dielectrics during cryogenic etching
Publication type
Proceedings paper
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