Browsing by author "Constantoudis, V."
Now showing items 1-4 of 4
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Effects of different processing conditions on line edge roughness for 193-nm and 157-nm resists
Ercken, Monique; Leunissen, Peter; Pollentier, Ivan; Patsis, G.; Constantoudis, V.; Gogolides, Evangelos (2004) -
Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions
Constantoudis, V.; Patsis, G.P.; Leunissen, Peter; Gogolides, E. (2004-08) -
Quantification of line-edge roughness of photoresists. I: A comparison between off-line and on-line analysis of top-down scanning electron microscopy images
Patsis, G.P.; Constantoudis, V.; Tserepi, A.; Gogolides, E.; Grozev, Grozdan (2003) -
Roughness analysis of lithographically produced nanostructures: off-line measurement and scaling analysis
Patsis, G.P.; Constantoudis, V.; Tserepi, A.; Gogolides, E.; Grozev, Grozdan; Hoffmann, Thomas (2003)