Authors

Patsis, G.P.; Constantoudis, V.; Tserepi, A.; Gogolides, E.; Grozev, Grozdan

Issue

3

Journal

Journal of Vacuum Science & Technology B

Volume

21

Title

Quantification of line-edge roughness of photoresists. I: A comparison between off-line and on-line analysis of top-down scanning electron microscopy images

Publication type

Journal article