Browsing by author "Bal, Stef"

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Pattern collapse of high-aspect-ratio silicon nanostructures - A parametric study

Vrancken, Nandi; Vereecke, Guy; Bal, Stef; Sergeant, Stefanie; Doumen, Geert; Holsteyns, Frank; Terryn, Herman; De Gendt, Stefan; Xu, XiuMei (2016)