Pattern collapse of high-aspect-ratio silicon nanostructures - A parametric study

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Authors
Vrancken, Nandi; Vereecke, Guy; Bal, Stef; Sergeant, Stefanie; Doumen, Geert; Holsteyns, Frank; Terryn, Herman; De Gendt, Stefan; Xu, XiuMei
Conference
Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS
Title
Pattern collapse of high-aspect-ratio silicon nanostructures - A parametric study
Publication type
Proceedings paper
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