Publication:

Pattern collapse of high-aspect-ratio silicon nanostructures - A parametric study

Date

2016

Proceedings Paper

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Author(s)

Vrancken, Nandi

;

;

;

Sergeant, Stefanie

;

;

Holsteyns, Frank

;

;

De Gendt, Stefan

;

Statistics

1961 since deposited on 2021-10-23

Acq. date: 2026-04-26