Browsing by author "Stollenwerk, Jochen"

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Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet

Bahrenberg, Lukas; Danylyuk, Serhiy; Brose, Sascha; Pollentier, Ivan; Timmermans, Marina; Gallagher, Emily; Stollenwerk, Jochen; Loosen, Peter (2017)