Authors

Bahrenberg, Lukas; Danylyuk, Serhiy; Brose, Sascha; Pollentier, Ivan; Timmermans, Marina; Gallagher, Emily; Stollenwerk, Jochen; Loosen, Peter

DOI

10.1117/12.2280579

Conference

International Conference on Extreme Ultraviolet Lithography

Title

Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet

Publication type

Proceedings paper