Publication:
Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet
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1943 since deposited on 2021-10-24
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Acq. date: 2026-09-03
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Statistics
Views
1943 since deposited on 2021-10-24
3last month
3last week
Acq. date: 2026-09-03
Citations