Browsing by author "Goethals, F."
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Sealed ultra low-k organosilica films with unprecedented electrical and mechanical properties
Goethals, F.; Levrau, E.; Pollefeyt, G.; Baklanov, Mikhaïl; Ciofi, Ivan; Vanstreels, Kris; Detavernier, C.; Van Driessche, I.; Van Der Voort, P. (2013)