Authors

Goethals, F.; Levrau, E.; Pollefeyt, G.; Baklanov, Mikhaïl; Ciofi, Ivan; Vanstreels, Kris; Detavernier, C.; Van Driessche, I.; Van Der Voort, P.

ISSN

2050-7526

Issue

25

Journal

Journal of Materials Chemistry C

Volume

1

Title

Sealed ultra low-k organosilica films with unprecedented electrical and mechanical properties

Publication type

Journal article