Publication:

Sealed ultra low-k organosilica films with unprecedented electrical and mechanical properties

Date

2013

Journal article

Simple item page Full metadata Statistics

Author(s)

;

;

;

Baklanov, Mikhaïl

;

;

Vanstreels, Kris

;

Detavernier, C.

;

Van Driessche, I.

;

Van Der Voort, P.

Journal

Journal of Materials Chemistry C

Statistics

1931 since deposited on 2021-10-21

Acq. date: 2026-03-17