Sealed ultra low-k organosilica films with unprecedented electrical and mechanical properties

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Author(s)

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Baklanov, Mikhaïl

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Vanstreels, Kris

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Detavernier, C.

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Van Driessche, I.

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Van Der Voort, P.

Journal

Journal of Materials Chemistry C

Metrics

1928 since deposited on 2021-10-21

Acq. date: 2025-10-29