Browsing by author "Maruyama, Kotaro"
Now showing items 1-3 of 3
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Advanced high voltage e-beam system combined with an enhanced D2DB for on-device overlay measurement
Kang, Seulki; Maruyama, Kotaro; Yamazaki, Yuichiro; Beggiato, Matteo; Veloso, Anabela; Lorusso, Gian (2023) -
Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling
Wei, Chih-, I; Kang, Seulki; Das, Sayantan; Oya, Masahiro; Okamoto, Yosuke; Maruyama, Kotaro; Fenger, Germain; Latypov, Azat; Kusnadi, Ir; Khaira, Gurdaman; Yamazaki, Yuichiro; Gillijns, Werner; Halder, Sandip; Lorusso, Gian (2023) -
E-beam metrology-based EUVL aberration monitoring
Kang, Seulki; Miura, Yuji; Maruyama, Kotaro; Yamazaki, Yuichiro; Wei, Chih-, I; Maguire, Ethan; Fenger, Germain; De Bisschop, Peter; Das, Sayantan; Halder, Sandip; Lorusso, Gian (2022)