Browsing by author "Funhoff, D."

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Robust and environmentally stable deep UV positive resist: optimization of SUCCESS ST2

Schwalm, R.; Binder, H.; Fischer, T.; Funhoff, D.; Goethals, Mieke; Grassmann, A.; Moritz, H.; Paniez, P.; Reuhman-Huisken, M.; Vinet, F.; Dijkstra, H.; Krause, A. (1994)