Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Robust and environmentally stable deep UV positive resist: optimization of SUCCESS ST2
Publication:
Robust and environmentally stable deep UV positive resist: optimization of SUCCESS ST2
Copy permalink
Date
1994
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
29578.pdf
717.94 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schwalm, R.
;
Binder, H.
;
Fischer, T.
;
Funhoff, D.
;
Goethals, Mieke
;
Grassmann, A.
;
Moritz, H.
;
Paniez, P.
;
Reuhman-Huisken, M.
;
Vinet, F.
;
Dijkstra, H.
;
Krause, A.
Journal
Abstract
Description
Metrics
Views
2225
since deposited on 2021-09-29
Acq. date: 2025-12-10
Citations
Metrics
Views
2225
since deposited on 2021-09-29
Acq. date: 2025-12-10
Citations