Browsing by author "Noya, G."
Now showing items 1-2 of 2
-
High thermal stability and high VUV absorption polymer for the P4/pore stuffing approach
Rutigliani, Vito; Zhang, Liping; de Marneffe, Jean-Francois; Cao, Yi; Noya, G.; Baklanov, Mikhaïl (2015) -
Optimized pore stuffing for enhanced compatibility with interconnect integration flow
de Marneffe, Jean-Francois; Zhang, Liping; Rutigliani, Vito; Noya, G.; Cao, Yi; Lesniewska, Alicja; Varela Pedreira, Olalla; Croes, Kristof; Gillot, Christophe; Tokei, Zsolt; Boemmels, Juergen; Baklanov, Mikhaïl (2015)