Publication:

Optimized pore stuffing for enhanced compatibility with interconnect integration flow

Date

2015

Proceedings Paper

https://doi.org/10.1109/IITC-MAM.2015.7325639

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31514.pdf 144.62 KB

Author(s)

de Marneffe, Jean-Francois

;

;

Rutigliani, Vito

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;

;

Lesniewska, Alicja

;

Varela Pedreira, Olalla

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;

Gillot, Christophe

;

;

Boemmels, Juergen

;

Baklanov, Mikhail

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1928 since deposited on 2021-10-22

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Acq. date: 2026-05-20