Authors

de Marneffe, Jean-Francois; Zhang, Liping; Rutigliani, Vito; Noya, G.; Cao, Yi; Lesniewska, Alicja; Varela Pedreira, Olalla; Croes, Kristof; Gillot, Christophe; Tokei, Zsolt; Boemmels, Juergen; Baklanov, Mikhaïl

Conference

IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM

Title

Optimized pore stuffing for enhanced compatibility with interconnect integration flow

Publication type

Proceedings paper

Embargo date

9999-12-31