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High thermal stability and high VUV absorption polymer for the P4/pore stuffing approach
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Authors
Rutigliani, Vito
;
Zhang, Liping
;
de Marneffe, Jean-Francois
;
Cao, Yi
;
Noya, G.
;
Baklanov, Mikhaïl
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
High thermal stability and high VUV absorption polymer for the P4/pore stuffing approach
Publication type
Meeting abstract
Embargo date
9999-12-31
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