Publication:

High thermal stability and high VUV absorption polymer for the P4/pore stuffing approach

Date

2015
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorRutigliani, Vito
dc.contributor.authorZhang, Liping
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorCao, Yi
dc.contributor.authorNoya, G.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-22T22:26:07Z
dc.date.available2021-10-22T22:26:07Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25845
dc.identifier.urlhttp://pesm-conference.org/files/2015_abstractbook.pdf
dc.source.beginpagen/a
dc.source.conferencePlasma Etch and Strip in Microtechnology - PESM
dc.source.conferencedate27/04/2015
dc.source.conferencelocationLeuven Belgium
dc.title

High thermal stability and high VUV absorption polymer for the P4/pore stuffing approach

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
31901.pdf
Size:
81.03 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions