Browsing by author "Chen, Jimmy"
Now showing items 1-3 of 3
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Diode characteristics and thermal donor formation in germanium-doped silicon substrates
Rafi, J.-M.; Vanhellemont, J.; Simoen, Eddy; Chen, Jimmy; Yang, D.; Zabala, M.; China, E.; Lechon, M. (2011) -
Electrical properties along grain boundaries in multicrystalline silicon measured by capacitance technique
Chen, Jimmy; Simoen, Eddy; Cornagliotti, Emanuele; Hieckmann, E.; Weber, J.; Poortmans, Jef (2011) -
Large area EUV via yield analysis for single damascene process: voltage contrast, CD and defect metrology
Blanco, Victor; Paolillo, Sara; van der Veen, Marleen; Lariviere, Stephane; Lorusso, Gian; De Poortere, Etienne; Tabery, Cyrus; Qiao, Fu; Lai, Shu-yu; Kea, Marc; Wang, Luke; Su, Yu Chi; Oh, Joe; Huang, Jim; Chen, Jimmy; Huang, Jonathan (2019)