Browsing by author "Ebeling, Robert P."

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First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials

Stortelder, Jetske; Ebeling, Robert P.; Rijnsent, Corne; van Putten, Michel; de Rooij-Lohmann, Veronique; Smit, Maximilian; Storm, Arnold J.; Koster, Norbert; Lensen, Henk A.; Philipsen, Vicky; Opsomer, Karl; Thakare, Devesh; Feigl, Torsten; Naujok, Philipp (2021)